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Carbide Coatings

TaC, NbC, and ZrC coatings resist chemical attack by corrosive liquids and gases at very high temperatures.  They are finding increasing acceptance in sealing and protecting graphite hardware from hot ammonia, hydrogen, hydrochloric acid, and molten metals used in compound semiconductor epitaxial processes such as MOCVD and LPE. The following characteristics of these carbide coatings provide long life and low partice generation

  •  Uniform
  •  Protective
  •  Electrically conductive
  •  Extremely wear resistant
  •  Conformal on intricate geometry

 

 

  Typical Properties 

 

TaC

 

 NbC 

 

ZrC  

  Density (gm/cc) 

15 

7.9 

6.7 

  Coating Temp. (°C) 

2100 

2100 

2100 

  Melting Point (°C) 

3880 

3760 

3540 

  Oxidation Limit (°C) 

700 

800 

800 

  Thermal Conductivity W/m-K 

22 

13 

21 

  Emissivity (Normal Spectral) 

0.5 

0.6 

0.4 

  CTE (10-4/°C) 

6.3 

6.7 

  Comp. Str. MPa 

2350 

820 

  Young’s Modulus (GPa) 

300-500 

350-500 

350-400 

  Elec. Resistivity (micro Ω cm) 

30 

30 

50 

 

Contacts

Contacts for Americas
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Momentive Performance Materials Inc
Ceramics Business 22557 W. Lunn Road Strongsville, OH 44149
North America

Customer Service

+1 440 878 5700
+1 440 878 5928 fax
cs-na.ceramics@momentive.com
EMEA

Customer Service

+49 4152 9380
+49 4152 938 136 fax
cs-eur.ceramics@momentive.com
Asia

Customer Service

+81 3 5114 3769
+81 3 5114 3777 fax
cs-asia.ceramics@momentive.com